From jdas at snf.stanford.edu  Fri Dec  7 01:19:24 2001
From: jdas at snf.stanford.edu (jdas at snf.stanford.edu)
Date: Dec 7, 2001 1:19:24 PM
Subject: Problem tylan3 2001-12-07 13:19:24: Tube 3 MFS Alarm [H2 led flashing]
Message-ID: <mailman.81.1357938831.25964.tylan3-pcs@snf.stanford.edu>

Alarm keeps coming on even after alarm acknowledgement



From seymour at snf.stanford.edu  Fri Dec  7 02:37:25 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Dec 7, 2001 2:37:25 PM
Subject: Problem tylan3 2001-12-07 13:19:24: Tube 3 MFS Alarm [H2 led flashing]
Message-ID: <mailman.82.1357938831.25964.tylan3-pcs@snf.stanford.edu>

rezeroed the h2 mfc controller and left the process running.
the thickness will be off as the H2 was not flowing during the  first part of recipe.



From gladys at snf.stanford.edu  Wed Dec 12 10:51:01 2001
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Dec 12, 2001 10:51:01 AM
Subject: Problem tylan3 2001-12-12 10:51:00: MFS ERROR: 01
Message-ID: <mailman.83.1357938831.25964.tylan3-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Wed Dec 12 11:33:54 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Dec 12, 2001 11:33:54 AM
Subject: Problem tylan3 2001-12-12 10:51:00: MFS ERROR: 01
Message-ID: <mailman.84.1357938831.25964.tylan3-pcs@snf.stanford.edu>

tube was having lo O2 leak and H2 leak alarms. Adjusted the MFC zero's and did a auto zero on the controller. Cleared the MFS460 "01" fault.