Problem tylan3 2001-07-09 21:22:04: loading/unloading does not work smoothly

davehong at snf.stanford.edu davehong at snf.stanford.edu
Mon Jul 9 09:22:06 PDT 2001


The loading/unloading track get stuck and stoped from time to time during loading and unloading wafers




More information about the tylan3-pcs mailing list