From hanjun at snf.stanford.edu Fri Aug 2 11:26:15 2002 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Aug 2, 2002 11:26:15 AM Subject: Problem tylan3 2002-08-02 11:26:15: fork was dropped and glass broken Message-ID: The wafer boat fork was dropped upon lifting it up, and one of the two glass covers was broken. It was found that the bolt wasn't tight enough on that side of the fork. From seymour at snf.stanford.edu Fri Aug 2 11:36:06 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 2, 2002 11:36:06 AM Subject: Problem tylan3 2002-08-02 11:26:15: fork was dropped and glass broken Message-ID: Replaced it with a new one From jdas at snf.stanford.edu Thu Aug 8 03:11:10 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Aug 8, 2002 3:11:10 PM Subject: Problem tylan3 2002-08-08 15:11:09: broken vacuum wand Message-ID: From seymour at snf.stanford.edu Thu Aug 8 03:43:29 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 8, 2002 3:43:29 PM Subject: Problem tylan3 2002-08-08 15:11:09: broken vacuum wand Message-ID: replaced broken tip From mcvittie at snf.stanford.edu Tue Aug 27 06:01:56 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 27, 2002 6:01:56 PM Subject: Problem tylan3 2002-08-27 18:01:55: H2 Leak Fault Message-ID: While doing a TCA clean, I got N2 carrier fault. I tried to fix the fault by wiggling the connectors, however I got an additional H2 leak fault. I manually shut down the H2 valve but the fault continued. I next haulted the TCAClean process. To use up any TCA in the tube, I let the Lo O2 continue to run for 1 hr. Jim McVittie From mcvittie at snf.stanford.edu Tue Aug 27 06:04:28 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 27, 2002 6:04:28 PM Subject: Shutdown tylan3 2002-08-27 18:04:25: H2 Leak Fault Message-ID: See problem report just reported. Jim From seymour at snf.stanford.edu Wed Aug 28 03:39:21 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 28, 2002 3:39:21 PM Subject: Shutdown tylan3 2002-08-27 18:04:25: H2 Leak Fault Message-ID: blocked injector line From seymour at snf.stanford.edu Wed Aug 28 03:39:35 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 28, 2002 3:39:35 PM Subject: Problem tylan3 2002-08-27 18:01:55: H2 Leak Fault Message-ID: blocked injector line From seymour at snf.stanford.edu Wed Aug 28 03:41:45 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Aug 28, 2002 3:41:45 PM Subject: Problem tylan3 2002-08-28 15:41:42: short TCA clean ran after fixing injector Message-ID: please see mary's email about possible issues with this tube and tubes 2 and 4. From mcvittie at snf.stanford.edu Wed Aug 28 07:05:33 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 28, 2002 7:05:33 PM Subject: Problem tylan3 2002-08-28 19:05:32: N2 Fault Message-ID: 6:30 PM FOUND TUBE IN ALARM WITH N2 FLOW FAULT. PUSHED ACK BOTTOM ON MANUAL PANAL. N2 FLOW LOOKS OK. From mcvittie at snf.stanford.edu Wed Aug 28 07:08:51 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 28, 2002 7:08:51 PM Subject: Problem tylan3 2002-08-28 19:05:32: N2 Fault Cleared --fault was on T#4 not #3 Message-ID: From mtang at snf.stanford.edu Wed Aug 28 19:27:04 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 28 Aug 2002 19:27:04 -0700 Subject: Use of Steam in Ox Furnaces Message-ID: <3D6D8678.8B0E56A0@snf.stanford.edu> I'm forwarding a note that Nancy wrote (below) as a warning for use of oxidation furnaces... We'll keep you posted... Mary ------------------- Folks, During TCA testing last night or this morning crud, probably from either the TCA bubbler or the TCA lines to oxditation tubes 1-4, was introducted into the tubes via the injectors. A short TCA dry clean was performed after the TCA lines were replaced, so we are fairly confident that the tubes are not contaminated. There may, however, be an issue when the injectors have gases flowing through them. Rather than shut down all the funaces, we are sending this warning against using wet programs in tylans1-4. If possible, please delay your steam oxidation processing until we have more information. A message describing all the events and issues should be forthcoming, but since you have all reserved ox furnaces for tonight or tomorrow morning you are receiving this advance warning. Thanks and appologies for any confusion of hassle this causes. Nancy -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mtang at snf.stanford.edu Wed Aug 28 07:28:17 2002 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Aug 28, 2002 7:28:17 PM Subject: Problem tylan3 2002-08-28 19:28:15: Please do no use steam ox til further notice Message-ID: