From gladys at snf.stanford.edu  Wed Mar 19 09:36:35 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Mar 19, 2003 9:36:35 AM
Subject: Shutdown tylan3 2003-03-19 09:36:32: Report Shutdown for tylan3 : shutdown for clean
Message-ID: <mailman.127.1357938831.25964.tylan3-pcs@snf.stanford.edu>

residue inside the tube, lots of red-orange particles 
at the front opening of the tube...



From tberg at snf.stanford.edu  Thu Mar 20 08:24:37 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mar 20, 2003 8:24:37 AM
Subject: Shutdown tylan3 2003-03-19 09:36:32: Report Clear for tylan3
Message-ID: <mailman.128.1357938831.25964.tylan3-pcs@snf.stanford.edu>

Orings replaced with brown viton, TCA clean performed



From mislam at snf.stanford.edu  Fri Mar 28 10:12:40 2003
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Mar 28, 2003 10:12:40 AM
Subject: Problem tylan3 2003-03-28 10:12:38: Report Problem for tylan3
Message-ID: <mailman.129.1357938831.25964.tylan3-pcs@snf.stanford.edu>

I am seeing 7% variation of oxide thickness
on the same wafer.  Oxide is thicker
on the top and thinner on bottom.



From gladys at snf.stanford.edu  Mon Mar 31 07:23:34 2003
From: gladys at snf.stanford.edu (gladys at snf.stanford.edu)
Date: Mar 31, 2003 7:23:34 PM
Subject: Problem tylan3 2003-03-28 10:12:38: Report Clear for tylan3
Message-ID: <mailman.130.1357938831.25964.tylan3-pcs@snf.stanford.edu>

testrun completed, ok to use