From parco at snf.stanford.edu Mon Apr 26 15:37:25 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Mon, 26 Apr 2004 15:37:25 -0700 Subject: Problem tylan3 2004-04-26 15:37:25: Did not achieve target growth thickness Message-ID: Recipe WET950 for 2hr:37min:0sec calculated on the thermal oxidation SNF process website for ~5200A. Did not target SiO2 growth thickness. Wafers (x12) measured at ~3628 ave., ~312A S.D. Noticed maintenance worker on or/near furnance area. ???Did pwr, stream, etc. turn off momentarily to reduced thermal growth, Will strip SiO2 and regrow again in tylan3. From parco at snf.stanford.edu Tue Apr 27 14:22:35 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Tue, 27 Apr 2004 14:22:35 -0700 Subject: Problem tylan3 2004-04-27 14:22:27: Problem Repeated Again Message-ID: Did not achieved desire SiO2 thickness (5200A). Measured on nanometrics ~3700A. In addition, thickness uniformity is not consistent (off by >20%++ from edge to center) , plus slight distinct of coloration is obvious to non-uniformity. From gladys at snf.stanford.edu Wed Apr 28 16:19:53 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Wed, 28 Apr 2004 16:19:53 -0700 Subject: Problem tylan3 2004-04-28 16:19:52: oxide uniformity Message-ID: testrun had a bad uniformity and 35% off on targetted thickness From tberg at snf.stanford.edu Fri Apr 30 06:18:07 2004 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 30 Apr 2004 06:18:07 -0700 Subject: Shutdown tylan3 2004-04-30 06:18:06: shutdown to investigate bad dep rate Message-ID: From mdickey at snf.stanford.edu Fri Apr 30 08:04:41 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Apr 2004 08:04:41 -0700 Subject: Shutdown tylan3 2004-04-30 06:18:06: shutdown to investigate bad dep rate Message-ID: replaced injector, door o rings and cantilever sheaths From mdickey at snf.stanford.edu Fri Apr 30 08:05:02 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Apr 2004 08:05:02 -0700 Subject: Problem tylan3 2004-04-26 15:37:25: Did not achieve target growth thickness Message-ID: Replaced door o rings and injector From mdickey at snf.stanford.edu Fri Apr 30 08:05:23 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 30 Apr 2004 08:05:23 -0700 Subject: Problem tylan3 2004-04-27 14:22:27: Problem Repeated Again Message-ID: replaced injector From gladys at snf.stanford.edu Fri Apr 30 13:26:19 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Fri, 30 Apr 2004 13:26:19 -0700 Subject: Problem tylan3 2004-04-28 16:19:52: oxide uniformity Message-ID: testrun is ok