From maurice at snf.stanford.edu  Tue Mar  1 16:37:51 2005
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 1 Mar 2005 16:37:51 -0800
Subject: Problem tylan3 SNF 2005-03-01 16:37:50: Bad uniformity
Message-ID: <mailman.163.1357938832.25964.tylan3-pcs@snf.stanford.edu>

User reported variation of 90A across wafer (target thickness=950A ).
Wet950 program



From maurice at snf.stanford.edu  Thu Mar 31 13:49:59 2005
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 31 Mar 2005 13:49:59 -0800
Subject: Comment tylan3 SNF 2005-03-31 13:49:58: uniformity test on Tylan3
Message-ID: <mailman.164.1357938832.25964.tylan3-pcs@snf.stanford.edu>

wet950 for 19 min
expected 1000ang
wafer#1   C:781; T:816; B:692; L:745; R:806
wafer#2   C:760; T:800; B:677; L:750; R:780



From maurice at snf.stanford.edu  Thu Mar 31 13:59:02 2005
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Thu, 31 Mar 2005 13:59:02 -0800
Subject: Shutdown tylan3 SNF 2005-03-31 13:59:02: uniformity issue
Message-ID: <mailman.165.1357938832.25964.tylan3-pcs@snf.stanford.edu>

Mike will replace injector



From mdickey at snf.stanford.edu  Thu Mar 31 14:14:43 2005
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Thu, 31 Mar 2005 14:14:43 -0800
Subject: Comment tylan3 SNF 2005-03-31 14:14:42: test
Message-ID: <mailman.166.1357938832.25964.tylan3-pcs@snf.stanford.edu>

System needs test after injector replacement