Comment tylan3 SNF 2005-03-31 13:49:58: uniformity test on Tylan3

maurice at snf.stanford.edu maurice at snf.stanford.edu
Thu Mar 31 13:49:59 PST 2005


wet950 for 19 min
expected 1000ang
wafer#1   C:781; T:816; B:692; L:745; R:806
wafer#2   C:760; T:800; B:677; L:750; R:780




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