Problem tylan3 SNF 2006-02-12 19:25:38: poor oxide uniformity

xzhuan1 at snf.stanford.edu xzhuan1 at snf.stanford.edu
Sun Feb 12 19:25:39 PST 2006


over 10% variation in oxide thickness in a single wafer with oxide thickness of 4500A.  Also the oxide film is much thinner than expected thickness of 6100A.




More information about the tylan3-pcs mailing list