Problem tylan3 SNF 2006-02-14 15:11:21: non uniform oxide

maurice at snf.stanford.edu maurice at snf.stanford.edu
Tue Feb 14 15:11:22 PST 2006


over 6.5% variation in oxide thickness in a single wafer with oxide thickness of 850A.  Also the oxide film is much thinner than expected thickness of 1000A.




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