From ratiug at snf.stanford.edu Thu Jun 1 18:04:50 2006 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Thu, 1 Jun 2006 18:04:50 -0700 Subject: Problem tylan3 SNF 2006-06-01 18:04:50: The tube fail to come out Message-ID: After I load the recipe and run it. The tube didn't come out. I even tried the manual mode. But ......didn't come out From mdickey at snf.stanford.edu Fri Jun 2 10:09:55 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 2 Jun 2006 10:09:55 -0700 Subject: Problem tylan3 SNF 2006-06-01 18:04:50: The tube fail to come out Message-ID: Adjusted door flag From latta at snf.stanford.edu Tue Jun 6 14:49:20 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 6 Jun 2006 14:49:20 -0700 Subject: Shutdown tylan3 SNF 2006-06-06 14:49:19: growth rate high- 50%+ Message-ID: From latta at snf.stanford.edu Wed Jun 7 09:50:24 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 7 Jun 2006 09:50:24 -0700 Subject: Shutdown tylan3 SNF 2006-06-06 14:49:19: growth rate high- 50%+ Message-ID: THickness fine for program run- operator error.... From latta at snf.stanford.edu Thu Jun 8 10:39:43 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 8 Jun 2006 10:39:43 -0700 Subject: Comment tylan3 SNF 2006-06-08 10:39:35: process quals- June Message-ID: over a 50 wafer spread- wafer-to-wafer = 6.2% within a wafer = 2.3% From jrjain at snf.stanford.edu Mon Jun 12 19:29:57 2006 From: jrjain at snf.stanford.edu (jrjain at snf.stanford.edu) Date: Mon, 12 Jun 2006 19:29:57 -0700 Subject: Shutdown tylan3 SNF 2006-06-12 19:29:55: Erratic Load Temperature Message-ID: The Load temperature fluctuates wildy (e.g. between 400 and 1200 within 2 minutes). Granted, the tube temperature itself is probably not fluctuating like this and only the reading is in error, but it merits attention. From mdickey at snf.stanford.edu Tue Jun 13 09:04:25 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 13 Jun 2006 09:04:25 -0700 Subject: Comment tylan3 SNF 2006-06-13 09:04:24: Test Message-ID: Test needed after profile T.C. change From latta at snf.stanford.edu Tue Jun 13 10:06:49 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Jun 2006 10:06:49 -0700 Subject: Comment tylan3 SNF 2006-05-05 16:08:18: process qual Message-ID: June's posted... From latta at snf.stanford.edu Tue Jun 13 13:19:31 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Jun 2006 13:19:31 -0700 Subject: Shutdown tylan3 SNF 2006-06-12 19:29:55: Erratic Load Temperature Message-ID: tested. Results to be posted as a comment. From latta at snf.stanford.edu Tue Jun 13 13:19:50 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 13 Jun 2006 13:19:50 -0700 Subject: Comment tylan3 SNF 2006-06-13 09:04:24: Test Message-ID: test- results soon. From latta at snf.stanford.edu Wed Jun 14 16:02:26 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 14 Jun 2006 16:02:26 -0700 Subject: Comment tylan3 SNF 2006-06-14 16:02:26: Process Qual after TC replacement- Message-ID: Average all wafers = 934A Wafer-to-wafer = 7.8% Within a wafer = 3.7% From latta at snf.stanford.edu Thu Jun 22 11:35:08 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 22 Jun 2006 11:35:08 -0700 Subject: Comment tylan3 SNF 2006-06-22 11:35:07: TCLCLEAN run 6/20 Message-ID: From latta at snf.stanford.edu Wed Jun 28 10:31:57 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Jun 2006 10:31:57 -0700 Subject: Comment tylan3 SNF 2006-06-28 10:31:56: TLCCLEAN tun Message-ID: From latta at snf.stanford.edu Wed Jun 28 10:32:03 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 28 Jun 2006 10:32:03 -0700 Subject: Comment tylan3 SNF 2006-06-22 11:35:07: TCLCLEAN run 6/20 Message-ID: