From latta at snf.stanford.edu Wed May 3 16:19:22 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 May 2006 16:19:22 -0700 Subject: Comment tylan3 SNF 2006-05-03 16:19:22: process qual Message-ID: WET900 00:39:00 wafer-to-wafer = 6.5% within-a-wafer = 15% From latta at snf.stanford.edu Wed May 3 16:20:46 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 3 May 2006 16:20:46 -0700 Subject: Problem tylan3 SNF 2006-05-03 16:20:44: process qual not good Message-ID: Wafer-to-wafer 6.5%, within-a-wafer 15% Door issues again? From mdickey at snf.stanford.edu Thu May 4 08:21:17 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 4 May 2006 08:21:17 -0700 Subject: Comment tylan3 SNF 2006-05-04 08:21:15: cantilever Message-ID: Cantilever rebuilt.... From latta at snf.stanford.edu Fri May 5 16:06:36 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:06:36 -0700 Subject: Problem tylan3 SNF 2006-04-28 11:36:11: door stopped before closed Message-ID: Fixed From latta at snf.stanford.edu Fri May 5 16:07:07 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:07:07 -0700 Subject: Comment tylan3 SNF 2006-04-28 12:40:21: Cleaned up rail and adjusted cantilever Message-ID: Noted From latta at snf.stanford.edu Fri May 5 16:08:18 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:08:18 -0700 Subject: Comment tylan3 SNF 2006-05-05 16:08:18: process qual Message-ID: WET900 00:39:00 Wafer-to-wafer = 1.0% Within-a-wafer = 0.8% From latta at snf.stanford.edu Fri May 5 16:08:44 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:08:44 -0700 Subject: Comment tylan3 SNF 2006-05-03 16:19:22: process qual Message-ID: Re-done. See 5/5/06 message From latta at snf.stanford.edu Fri May 5 16:09:17 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:09:17 -0700 Subject: Problem tylan3 SNF 2006-05-03 16:20:44: process qual not good Message-ID: Re-done. See message 5/5/06. From latta at snf.stanford.edu Fri May 5 16:09:35 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:09:35 -0700 Subject: Comment tylan3 SNF 2006-05-04 08:21:15: cantilever Message-ID: process qual good. From tberg at snf.stanford.edu Wed May 10 07:41:26 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 May 2006 07:41:26 -0700 Subject: Shutdown tylan3 SNF 2006-05-10 07:41:25: Gas Tie ins Message-ID: From tberg at snf.stanford.edu Wed May 10 08:44:16 2006 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Wed, 10 May 2006 08:44:16 -0700 Subject: Shutdown tylan3 SNF 2006-05-10 07:41:25: Gas Tie ins Message-ID: Tie ins completed back on line From maurice at snf.stanford.edu Thu May 11 13:47:00 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 May 2006 13:47:00 -0700 Subject: Shutdown tylan3 SNF 2006-05-11 13:45:40: No H2 Message-ID: From maurice at snf.stanford.edu Thu May 11 21:05:39 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 11 May 2006 21:05:39 -0700 Subject: Shutdown tylan3 SNF 2006-05-11 13:45:40: No H2 Message-ID: All gasses in the lab are now up and available and the safety system is totally operational. Please use caution with your processes since the hydrogen and oxygen lines were off for a long time. Check that your process is working normally before committing your wafers.