From seymour at snf.stanford.edu Fri Nov 3 13:03:52 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Nov 2006 13:03:52 -0800 Subject: Shutdown tylan3 SNF 2006-10-24 17:29:00: Alarms! Message-ID: profile t/c replaced. Load zone vestibule block repacked. Did backup t/c calibration to 1100 degrees. Needs a test after repair From seymour at snf.stanford.edu Fri Nov 3 13:04:22 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 3 Nov 2006 13:04:22 -0800 Subject: Problem tylan3 SNF 2006-11-03 13:04:21: needs test after repair Message-ID: From ericp at snf.stanford.edu Fri Nov 3 23:16:03 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Fri, 3 Nov 2006 23:16:03 -0800 Subject: Comment tylan3 SNF 2006-11-03 23:16:02: Qual after service Message-ID: Ran WET900 00:39:00, got ~0A. took MFS460 out of manual mode :^) , reran, and got the following: Ran WET900 00:39:00, three wafers, facing rearward, about 15cm apart (centered in each of the three boats). Flats UP. LOAD END: 911A, std dev 2.4A CENTER: 919A, std dev: 2.9A SOURCE END: 932A std dev 2.3A I'll give Nancy the raw data so she can put it into her usual format for quals, but in any case, I think it's back to GREEN for tylan3! The three wafers provided by Maurice are back in his box, sitting next to Epi. If you care to re-measure, the wafer in slot#1 is the LOAD end, and slot#3 is the SOURCE end. -Eric From maurice at snf.stanford.edu Mon Nov 6 09:24:33 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Nov 2006 09:24:33 -0800 Subject: Problem tylan3 SNF 2006-11-03 13:04:21: needs test after repair Message-ID: CENTER: 919A, std dev: 2.9A SOURCE END: 932A std dev 2.3A I'll give Nancy the raw data so she can put it into her usual format for quals, but in any case, I think it's back to GREEN for tylan3! The three wafers provided by Maurice are back in his box, sitting next to Epi. If you care to re-measure, the wafer in slot#1 is the LOAD end, and slot#3 is the SOURCE end. -Eric From latta at snf.stanford.edu Tue Nov 7 13:54:04 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Nov 2006 13:54:04 -0800 Subject: Comment tylan3 SNF 2006-10-10 17:30:20: Oct process quals Message-ID: to the archives From latta at snf.stanford.edu Tue Nov 7 13:57:55 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Nov 2006 13:57:55 -0800 Subject: Comment tylan3 SNF 2006-11-07 13:57:55: Qual after reapirs Message-ID: profile TC replaced, tube repacked and backed TC calibrated. Ericp's results after WET900 00:39:00 Average all wafers = 920A Wafer-to-wafer = 1.1% Within-a-wafer = 0.5%