From latta at snf.stanford.edu  Tue Oct  3 11:04:16 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 3 Oct 2006 11:04:16 -0700
Subject: Comment tylan3 SNF 2006-09-05 18:13:26: Running TLCCLEAN
Message-ID: <mailman.244.1357938832.25964.tylan3-pcs@snf.stanford.edu>

thank you, Robin.



From latta at snf.stanford.edu  Tue Oct  3 11:04:56 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 3 Oct 2006 11:04:56 -0700
Subject: Comment tylan3 SNF 2006-07-13 15:38:42: Process quals- July
Message-ID: <mailman.245.1357938832.25964.tylan3-pcs@snf.stanford.edu>

to the archives



From latta at snf.stanford.edu  Tue Oct  3 11:05:12 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 3 Oct 2006 11:05:12 -0700
Subject: Comment tylan3 SNF 2006-08-03 16:08:29: Aug process quals results
Message-ID: <mailman.246.1357938832.25964.tylan3-pcs@snf.stanford.edu>

to the archives...



From latta at snf.stanford.edu  Tue Oct  3 17:12:12 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 3 Oct 2006 17:12:12 -0700
Subject: Comment tylan3 SNF 2006-10-03 17:12:12: Oct Process Quals
Message-ID: <mailman.247.1357938832.25964.tylan3-pcs@snf.stanford.edu>

WET900   00:39:00
Average all wafers = 838A
Wafer-to-wafer = 5.4%
Within-a-wafer = 3.4%



From latta at snf.stanford.edu  Tue Oct  3 17:13:31 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 3 Oct 2006 17:13:31 -0700
Subject: Problem tylan3 SNF 2006-10-03 17:13:30: Process quals not good
Message-ID: <mailman.248.1357938832.25964.tylan3-pcs@snf.stanford.edu>

Wafer to wafer uniformity too high- 17.4% and thinckness too low.



From latta at snf.stanford.edu  Tue Oct  3 17:14:58 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 3 Oct 2006 17:14:58 -0700
Subject: Comment tylan3 SNF 2006-10-03 17:14:57: Oct Process Quals
Message-ID: <mailman.249.1357938832.25964.tylan3-pcs@snf.stanford.edu>

WET900   00:39:00
Average all wafers = 838A
Wafer-to-wafer = 17.4%
Within-a-wafer = 3.2%



From latta at snf.stanford.edu  Tue Oct  3 17:17:07 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 3 Oct 2006 17:17:07 -0700
Subject: Comment tylan3 SNF 2006-10-03 17:12:12: Oct Process Quals
Message-ID: <mailman.250.1357938832.25964.tylan3-pcs@snf.stanford.edu>

Cleared because of typo.  Corrected numbers posted in comments.



From seymour at snf.stanford.edu  Wed Oct  4 10:50:51 2006
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 4 Oct 2006 10:50:51 -0700
Subject: Comment tylan3 SNF 2006-10-04 10:50:51: injector replaced
Message-ID: <mailman.251.1357938832.25964.tylan3-pcs@snf.stanford.edu>

Running trans l clean willl need uniformity test when clean completed.



From latta at snf.stanford.edu  Wed Oct  4 17:19:52 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 4 Oct 2006 17:19:52 -0700
Subject: Comment tylan3 SNF 2006-09-01 16:23:25: Sept Process Quals
Message-ID: <mailman.252.1357938832.25964.tylan3-pcs@snf.stanford.edu>

to the archive



From latta at snf.stanford.edu  Tue Oct 10 17:28:35 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 10 Oct 2006 17:28:35 -0700
Subject: Problem tylan3 SNF 2006-10-03 17:13:30: Process quals not good
Message-ID: <mailman.253.1357938832.25964.tylan3-pcs@snf.stanford.edu>

injector change- quals re-run



From latta at snf.stanford.edu  Tue Oct 10 17:28:56 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 10 Oct 2006 17:28:56 -0700
Subject: Comment tylan3 SNF 2006-10-03 17:14:57: Oct Process Quals
Message-ID: <mailman.254.1357938832.25964.tylan3-pcs@snf.stanford.edu>

new quals run



From latta at snf.stanford.edu  Tue Oct 10 17:29:14 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 10 Oct 2006 17:29:14 -0700
Subject: Comment tylan3 SNF 2006-10-04 10:50:51: injector replaced
Message-ID: <mailman.255.1357938832.25964.tylan3-pcs@snf.stanford.edu>

new qual test run



From latta at snf.stanford.edu  Tue Oct 10 17:30:22 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 10 Oct 2006 17:30:22 -0700
Subject: Comment tylan3 SNF 2006-10-10 17:30:20: Oct process quals
Message-ID: <mailman.256.1357938832.25964.tylan3-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 918A
Wafer-to-wafer = 2.5%
Within-a-wafer = 1.7%



From duygu at snf.stanford.edu  Fri Oct 20 19:27:12 2006
From: duygu at snf.stanford.edu (duygu at snf.stanford.edu)
Date: Fri, 20 Oct 2006 19:27:12 -0700
Subject: Problem tylan3 SNF 2006-10-20 19:27:11: center thermocouple bad reading
Message-ID: <mailman.257.1357938832.25964.tylan3-pcs@snf.stanford.edu>

Also it gave MFS alarm during run



From latta at snf.stanford.edu  Tue Oct 24 17:29:01 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 24 Oct 2006 17:29:01 -0700
Subject: Shutdown tylan3 SNF 2006-10-24 17:29:00: Alarms!
Message-ID: <mailman.258.1357938832.25964.tylan3-pcs@snf.stanford.edu>

Oh, where to start...
Running TLCCLEAN program and in step 25 a bunch of alarms went off; all gas indicators blinking, N2 leak, tycom shows MFS 08, and load TC reading low, center TC shows small b.  Aborted and appears that Hi O2 is running, although low (98-113)
And we can't get the ALARMS TO TURN OFF.  That might explain any tape you find tomorrow am plastered to the controller.



From latta at snf.stanford.edu  Thu Oct 26 10:23:03 2006
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 26 Oct 2006 10:23:03 -0700
Subject: Problem tylan3 SNF 2006-10-20 19:27:11: center thermocouple bad reading
Message-ID: <mailman.259.1357938832.25964.tylan3-pcs@snf.stanford.edu>

Put inot shutdown for these problems...