From latta at snf.stanford.edu  Wed Aug  1 17:15:18 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 1 Aug 2007 17:15:18 -0700
Subject: Comment tylan3 SNF 2007-07-05 16:26:21: July process quals
Message-ID: <mailman.341.1357938833.25964.tylan3-pcs@snf.stanford.edu>

To the archives!



From latta at snf.stanford.edu  Wed Aug  1 17:16:50 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 1 Aug 2007 17:16:50 -0700
Subject: Comment tylan3 SNF 2007-08-01 17:16:49: Aug Process Quals
Message-ID: <mailman.342.1357938833.25964.tylan3-pcs@snf.stanford.edu>

WET900  00:39:00  50 Wafer spread
Average all wafers = 984A
Within-a-wafer = 1.2%
Wafer-to-wafer = 1.7%



From mdickey at snf.stanford.edu  Tue Aug  7 12:25:32 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 7 Aug 2007 12:25:32 -0700
Subject: Shutdown tylan3 SNF 2007-08-07 12:25:31: Element
Message-ID: <mailman.343.1357938833.25964.tylan3-pcs@snf.stanford.edu>

Element shut off to do element change on Tylan 2



From mdickey at snf.stanford.edu  Tue Aug  7 14:02:52 2007
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 7 Aug 2007 14:02:52 -0700
Subject: Shutdown tylan3 SNF 2007-08-07 12:25:31: Element
Message-ID: <mailman.344.1357938833.25964.tylan3-pcs@snf.stanford.edu>

Element is back heating up. Ready for use when temp
stabilizes



From latta at snf.stanford.edu  Tue Aug 28 16:38:20 2007
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Tue, 28 Aug 2007 16:38:20 -0700
Subject: Comment tylan3 SNF 2007-08-28 16:38:20: Sept Process Quals
Message-ID: <mailman.345.1357938833.25964.tylan3-pcs@snf.stanford.edu>

Jumping the gun a bit....)
WET900  00:39:00  50 wafer spread
Average all wafers = 1009A
Within-a-wafer = 0.8%
Wafer-to-wafer = 0.5%
Go, tylan3!!