From latta at snf.stanford.edu Thu Feb 1 12:57:01 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Feb 2007 12:57:01 -0800 Subject: Problem tylan3 SNF 2007-02-01 12:57:01: TC L reading 400C'ish Message-ID: Quals oxide thin. Might need the same reaming that tylan2 got this am! From latta at snf.stanford.edu Thu Feb 1 17:24:57 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Feb 2007 17:24:57 -0800 Subject: Comment tylan3 SNF 2007-01-03 16:55:52: Jan process quals Message-ID: to the archives! From latta at snf.stanford.edu Thu Feb 1 17:26:50 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 1 Feb 2007 17:26:50 -0800 Subject: Problem tylan3 SNF 2007-02-01 17:26:49: Feb process quals BAD Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 677A Within-a-wafer = 2.9% Wafer-to-wafer = 17% Load TC was ok, then bad, reading 400'ish. From latta at snf.stanford.edu Fri Feb 2 15:25:27 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Feb 2007 15:25:27 -0800 Subject: Problem tylan3 SNF 2007-02-01 12:57:01: TC L reading 400C'ish Message-ID: Load TC connector srubbed out. Reads normal. From latta at snf.stanford.edu Fri Feb 2 15:26:16 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Feb 2007 15:26:16 -0800 Subject: Problem tylan3 SNF 2007-02-01 17:26:49: Feb process quals BAD Message-ID: Re-tested after repair. Results good. See comments for details. From latta at snf.stanford.edu Fri Feb 2 16:27:04 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 2 Feb 2007 16:27:04 -0800 Subject: Comment tylan3 SNF 2007-02-02 16:27:04: Feb process quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1091A Within-a-wafer = 1.6% Wafer-to-wafer = 4.4% From mdickey at snf.stanford.edu Wed Feb 7 13:51:37 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 7 Feb 2007 13:51:37 -0800 Subject: Comment tylan3 SNF 2007-02-07 13:51:36: Temp problem Message-ID: Checking out temp problems. From king at snf.stanford.edu Mon Feb 26 18:10:25 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 26 Feb 2007 18:10:25 -0800 Subject: Problem tylan3 SNF 2007-02-26 18:10:24: Please replace the T/C block and connectors Message-ID: They are worn out and fit very loosely, causing dramatic indicated temp fluctuations, which ruins our wafers. Some users say all the Tylans have the same problem including the LPCVDs. Thanks. From king at snf.stanford.edu Mon Feb 26 22:54:40 2007 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Mon, 26 Feb 2007 22:54:40 -0800 Subject: Problem tylan3 SNF 2007-02-26 22:54:39: Front (load end) element is weak Message-ID: Load power stays near 100% but never reaches temperature (ecxept from heat from the adjacent zone. From latta at snf.stanford.edu Tue Feb 27 17:34:03 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 27 Feb 2007 17:34:03 -0800 Subject: Shutdown tylan3 SNF 2007-02-27 17:34:03: Temp issues Message-ID: Should be listed as shutdown.... From mdickey at snf.stanford.edu Wed Feb 28 14:08:04 2007 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 28 Feb 2007 14:08:04 -0800 Subject: Comment tylan3 SNF 2007-02-28 14:08:04: Element off Message-ID: Turning off furnace to deal with packing issues and to be able to work on Tylan 2.