From latta at snf.stanford.edu Thu Jul 5 16:24:24 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:24:24 -0700 Subject: Comment tylan3 SNF 2007-06-01 17:13:10: June Process Quals Message-ID: to the archives... From latta at snf.stanford.edu Thu Jul 5 16:26:22 2007 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 Jul 2007 16:26:22 -0700 Subject: Comment tylan3 SNF 2007-07-05 16:26:21: July process quals Message-ID: WET900 00:39:00 50 wafer spread Average all wafers = 1013A Wafer-to-wafer = 1.5% Within-a-wafer = 0.8%