From latta at snf.stanford.edu  Thu Jan  3 17:42:36 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 3 Jan 2008 17:42:36 -0800
Subject: Comment tylan3 SNF 2008-01-03 17:42:35: Jan process quals
Message-ID: <mailman.355.1357938833.25964.tylan3-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
Average all wafers = 1030A  (expect about 1000A)
Within-a-wafer = 0.4%  (expect less than 5%)
Wafer-to-wafer = 1.0% (expect less than 5%)



From latta at snf.stanford.edu  Thu Jan  3 17:42:41 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 3 Jan 2008 17:42:41 -0800
Subject: Comment tylan3 SNF 2007-12-04 17:12:01: Dec Process Quals
Message-ID: <mailman.356.1357938833.25964.tylan3-pcs@snf.stanford.edu>




From gibby at snf.stanford.edu  Fri Jan 18 18:52:17 2008
From: gibby at snf.stanford.edu (gibby at snf.stanford.edu)
Date: Fri, 18 Jan 2008 18:52:17 -0800
Subject: Problem tylan3 SNF 2008-01-18 18:52:17: Tube Alarming
Message-ID: <mailman.357.1357938833.25964.tylan3-pcs@snf.stanford.edu>

Audible alarm.  Tube reads "O2HI NTLK".



From gibby at snf.stanford.edu  Fri Jan 18 19:52:13 2008
From: gibby at snf.stanford.edu (gibby at snf.stanford.edu)
Date: Fri, 18 Jan 2008 19:52:13 -0800
Subject: Shutdown tylan3 SNF 2008-01-18 19:52:13: Tube would not pull
Message-ID: <mailman.358.1357938833.25964.tylan3-pcs@snf.stanford.edu>

After noticing the problem reported earlier, I saw that tube 3 started to pull out.  About 30-45 minutes later, the tube was still out with two nasty-looking wafers still inside.  I hit alarm ack twice and the tube started to pull in, but stopped after moving a fraction of an inch.  With Raja's help, we manually closed the tube, though the tube required some gentle nudging to get it closed completely.  The two wafers in the tube were placed in a silicide cassette.



From mdickey at snf.stanford.edu  Tue Jan 22 06:49:55 2008
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 22 Jan 2008 06:49:55 -0800
Subject: Shutdown tylan3 SNF 2008-01-18 19:52:13: Tube would not pull
Message-ID: <mailman.359.1357938833.25964.tylan3-pcs@snf.stanford.edu>

Boat loader cable needed tightening. Tested and is now ready
to use



From rissman at snf.stanford.edu  Fri Jan 25 09:08:56 2008
From: rissman at snf.stanford.edu (rissman at snf.stanford.edu)
Date: Fri, 25 Jan 2008 09:08:56 -0800
Subject: Problem tylan3 SNF 2008-01-18 18:52:17: Tube Alarming
Message-ID: <mailman.360.1357938833.25964.tylan3-pcs@snf.stanford.edu>

Haven't seen problems since.  Will continue to watch.