Comment tylan3 SNF 2008-03-11 16:25:35: Mar process quals

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Mar 11 16:25:36 PDT 2008


WET900  00:39:00  50 wafer spread
Average all wafers = 1064A  (expect about 1000A)
Within-a-wafer = 0.6%  (expect less than 5%)
Wafer-to-wafer = 1.0% (expect less than 5%)




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