Problem tylan3 SNF 2009-04-07 15:09:49: April re-qual

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Apr 7 15:09:50 PDT 2009


WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 815A, Std Dev = 5.9
Front Center = 833A, Std Dev = 7.7
Back Center = 898A, Std Dev = 7.5
Back = 987A, Std Dev = 10.1
Average All = 883A
After door adjustment and injector check.
Std dev improved, but wafer-to-wafer uniformity not good.




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