From latta at snf.stanford.edu  Wed Aug 12 17:44:15 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 12 Aug 2009 17:44:15 -0700
Subject: Comment tylan3 SNF 2009-07-09 15:21:16: Re-qual after door align and shealth replace
Message-ID: <mailman.459.1357938834.25964.tylan3-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Wed Aug 12 17:45:49 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Wed, 12 Aug 2009 17:45:49 -0700
Subject: Comment tylan3 SNF 2009-08-12 17:45:49: aug quals
Message-ID: <mailman.460.1357938834.25964.tylan3-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 907A, Std Dev = 2.8
Front Center = 916A, Std Dev = 3.1
Back Center = 921A, Std Dev = 2.9
Back = 918A, Std Dev = 2.4
Average All = 916A