From tberg at snf.stanford.edu Thu May 7 12:58:53 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 7 May 2009 12:58:53 -0700 Subject: Shutdown tylan3 SNF 2009-05-07 12:58:53: H2 flow too High Message-ID: From seymour at snf.stanford.edu Thu May 7 13:46:55 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 7 May 2009 13:46:55 -0700 Subject: Shutdown tylan3 SNF 2009-05-07 12:58:53: H2 flow too High Message-ID: checled and adjusted H2 zero. checked flow with O2 set at 1000 and H2 set at 150. O2 flowed at 1005 and H2 was 1509. From tberg at snf.stanford.edu Fri May 8 06:28:32 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 8 May 2009 06:28:32 -0700 Subject: Problem tylan3 SNF 2009-05-08 06:28:31: h2 errors Message-ID: From seymour at snf.stanford.edu Fri May 8 08:03:56 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 May 2009 08:03:56 -0700 Subject: Problem tylan3 SNF 2009-05-08 06:28:31: h2 errors Message-ID: found O2LO N2Carrier and H2 MFC to be off zero. chekced all and adjusted. Also had no auto error checked and reconnected serial connector to MFS460. all gases reading zero if off and correct flows if given a setpoint on the tycom From seymour at snf.stanford.edu Fri May 8 08:32:37 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Fri, 8 May 2009 08:32:37 -0700 Subject: Shutdown tylan3 SNF 2009-05-08 08:32:36: H2 flowmeter unstable Message-ID: From latta at snf.stanford.edu Thu May 14 15:39:51 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 May 2009 15:39:51 -0700 Subject: Comment tylan3 SNF 2009-05-14 15:39:51: May quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 836A, Std Dev = 19.9 Front Center = 862A, Std Dev = 17.3 Back Center = 883A, Std Dev = 15.1 Back = 906A, Std Dev = 9.9 Average All = 872A From latta at snf.stanford.edu Thu May 14 15:40:58 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 14 May 2009 15:40:58 -0700 Subject: Problem tylan3 SNF 2009-05-14 15:40:57: Quals bad Message-ID: May's quals are terrible- ox thickness way too low, std dev very high. From tberg at snf.stanford.edu Fri May 15 07:50:51 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Fri, 15 May 2009 07:50:51 -0700 Subject: Comment tylan3 SNF 2009-05-15 07:50:50: Replaced torch Message-ID: From latta at snf.stanford.edu Fri May 15 16:13:35 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 16:13:35 -0700 Subject: Comment tylan3 SNF 2009-05-15 16:13:35: May re-qual after torch change Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 910A, Std Dev = 4.1 Front Center = 915A, Std Dev = 3.9 Back Center = 917A, Std Dev = 3.7 Back = 916A, Std Dev = 2.9 Average All = 915A From latta at snf.stanford.edu Fri May 15 16:14:48 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 16:14:48 -0700 Subject: Problem tylan3 SNF 2009-05-14 15:40:57: Quals bad Message-ID: re-qual came in very good. Thickness is a bit low, but wf-to-wf uniformity is great and Std Dev well within spec. Green light! From latta at snf.stanford.edu Fri May 15 16:15:04 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 16:15:04 -0700 Subject: Comment tylan3 SNF 2009-05-14 15:39:51: May quals Message-ID: re-qual'd From latta at snf.stanford.edu Fri May 15 16:15:24 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 16:15:24 -0700 Subject: Comment tylan3 SNF 2009-04-08 13:54:40: April re-re-qual Message-ID: system passed May quals From latta at snf.stanford.edu Fri May 15 16:15:34 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 16:15:34 -0700 Subject: Comment tylan3 SNF 2009-04-14 21:32:28: DRY500 Message-ID: archived From latta at snf.stanford.edu Fri May 15 16:15:54 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 16:15:54 -0700 Subject: Shutdown tylan3 SNF 2009-05-08 08:32:36: H2 flowmeter unstable Message-ID: flowmeter replaced From latta at snf.stanford.edu Fri May 15 16:16:08 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 16:16:08 -0700 Subject: Comment tylan3 SNF 2009-05-15 07:50:50: Replaced torch Message-ID: archived From latta at snf.stanford.edu Fri May 15 17:09:51 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 15 May 2009 17:09:51 -0700 Subject: Problem tylan3 SNF 2009-05-15 17:09:51: Alarms during TLCCLEAN Message-ID: Both H2/O2 interlock and TCA interlock have been alaming at step 25. From seymour at snf.stanford.edu Mon May 18 09:00:40 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 May 2009 09:00:40 -0700 Subject: Shutdown tylan3 SNF 2009-05-18 09:00:39: H2 flow errors Message-ID: From seymour at snf.stanford.edu Mon May 18 13:27:44 2009 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 18 May 2009 13:27:44 -0700 Subject: Shutdown tylan3 SNF 2009-05-18 09:00:39: H2 flow errors Message-ID: replaced op amp for channel 1 (H2) and checkled O2 and H2 flows and repaired loose connection on serial connector for auto operation. From tberg at snf.stanford.edu Thu May 21 06:12:21 2009 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Thu, 21 May 2009 06:12:21 -0700 Subject: Problem tylan3 SNF 2009-05-15 17:09:51: Alarms during TLCCLEAN Message-ID: no alarms after flow cals