From latta at snf.stanford.edu  Thu Sep  3 12:48:05 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 3 Sep 2009 12:48:05 -0700
Subject: Comment tylan3 SNF 2009-09-03 12:48:04: Sept quals
Message-ID: <mailman.461.1357938834.25964.tylan3-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 638A, Std Dev = 44.6
Front Center = 691A, Std Dev = 42.8
Back Center = 727A, Std Dev = 40.7
Back = 760A, Std Dev = 31.4
Average All = 704A
This is one sick furnace.....



From latta at snf.stanford.edu  Thu Sep  3 12:48:14 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 3 Sep 2009 12:48:14 -0700
Subject: Comment tylan3 SNF 2009-08-12 17:45:49: aug quals
Message-ID: <mailman.462.1357938834.25964.tylan3-pcs@snf.stanford.edu>

archived



From seymour at snf.stanford.edu  Thu Sep 10 14:31:34 2009
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 10 Sep 2009 14:31:34 -0700
Subject: Comment tylan3 SNF 2009-09-10 14:31:33: tightened door 
Message-ID: <mailman.463.1357938834.25964.tylan3-pcs@snf.stanford.edu>

checked injector and it looks good tightened injector fitting. checked profile t/c fitting. 
Needs another test to check uniformity.



From latta at snf.stanford.edu  Fri Sep 11 17:29:45 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 11 Sep 2009 17:29:45 -0700
Subject: Comment tylan3 SNF 2009-09-10 14:31:33: tightened door 
Message-ID: <mailman.464.1357938834.25964.tylan3-pcs@snf.stanford.edu>

Test done and posted



From latta at snf.stanford.edu  Fri Sep 11 17:33:18 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 11 Sep 2009 17:33:18 -0700
Subject: Comment tylan3 SNF 2009-09-11 17:33:18: Sept re-qual
Message-ID: <mailman.465.1357938834.25964.tylan3-pcs@snf.stanford.edu>

After door aligned, torch and cantilever connectors tightened-
WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 901A, Std Dev = 3.0
Front Center = 912A, Std Dev = 3.0
Back Center = 917A, Std Dev = 3.1
Back = 911A, Std Dev = 2.1
Average All = 910A
Much better!



From latta at snf.stanford.edu  Fri Sep 11 17:33:42 2009
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 11 Sep 2009 17:33:42 -0700
Subject: Comment tylan3 SNF 2009-09-03 12:48:04: Sept quals
Message-ID: <mailman.466.1357938834.25964.tylan3-pcs@snf.stanford.edu>

Re-qual'd and posted