Shutdown tylan3 SNF 2010-07-13 00:06:55: wafer broke

merwan at snf.stanford.edu merwan at snf.stanford.edu
Tue Jul 13 00:06:56 PDT 2010


When I came to the furnace the 6 wafers were broken on the boat. There are still pieces inside. I don't know what happenned, when I loaded the wafers everything looked in place. The 6 wafers were in the middle boat each one behind the other




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