From latta at snf.stanford.edu Tue May 4 15:57:32 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 May 2010 15:57:32 -0700 Subject: Comment tylan3 SNF 2010-05-04 15:57:31: May quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 861A, Std Dev = 1.8 Front Center = 881A, Std Dev = 3.2 Back Center = 894A, Std Dev = 3.0 Back = 897A, Std Dev = 2.9 Average All = 883A From latta at snf.stanford.edu Tue May 4 15:57:46 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 4 May 2010 15:57:46 -0700 Subject: Comment tylan3 SNF 2010-04-02 17:23:40: April quals Message-ID: archived From maurice at snf.stanford.edu Tue May 25 10:54:47 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Tue, 25 May 2010 10:54:47 -0700 Subject: Problem tylan3 SNF 2010-05-25 10:54:46: vacuum wand bent Message-ID: From seymour at snf.stanford.edu Tue May 25 11:21:32 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Tue, 25 May 2010 11:21:32 -0700 Subject: Problem tylan3 SNF 2010-05-25 10:54:46: vacuum wand bent Message-ID: vacuum tip replaced From chienyuc at snf.stanford.edu Wed May 26 19:41:02 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Wed, 26 May 2010 19:41:02 -0700 Subject: Problem tylan3 SNF 2010-05-26 19:41:01: MFS Alarm 460 Message-ID: The O2 LO flow was wild (40-250, set=100) during ramp up step 15, recipe WET950. From seymour at snf.stanford.edu Thu May 27 08:44:53 2010 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 27 May 2010 08:44:53 -0700 Subject: Problem tylan3 SNF 2010-05-26 19:41:01: MFS Alarm 460 Message-ID: found O2LO mfc not at zero. adjusted to zero and did auto zero routine. MFC now at zero with no flow and flowes 99.8 when set at 100 sccm.