Problem tylan3 SNF 2010-05-26 19:41:01: MFS Alarm 460

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Wed May 26 19:41:02 PDT 2010


The O2 LO flow was wild (40-250, set=100) during ramp up step 15, recipe WET950.




More information about the tylan3-pcs mailing list