Problem tylan3 SNF 2010-05-26 19:41:01: MFS Alarm 460

seymour at snf.stanford.edu seymour at snf.stanford.edu
Thu May 27 08:44:53 PDT 2010


found O2LO mfc not at zero. adjusted to zero and did auto zero routine.
MFC now at zero with no flow and flowes 99.8 when set at 100 sccm.




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