From latta at snf.stanford.edu Fri Oct 1 17:40:59 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 1 Oct 2010 17:40:59 -0700 Subject: Comment tylan3 SNF 2010-10-01 17:40:59: Oct quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 881A, Std Dev = 1.9 Front Center = 899A, Std Dev = 2.8 Back Center = 911A, Std Dev = 2.8 Back = 914A, Std Dev = 1.9 Average All = 901A Thickness lower than expected. From latta at snf.stanford.edu Fri Oct 1 17:41:17 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 1 Oct 2010 17:41:17 -0700 Subject: Comment tylan3 SNF 2010-09-01 15:22:11: Sept quals Message-ID: new quals run From jaehlee at snf.stanford.edu Sat Oct 23 21:19:06 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Sat, 23 Oct 2010 21:19:06 -0700 Subject: Shutdown tylan3 SNF 2010-10-23 21:19:05: boat out error - wafer still in the furnace Message-ID: From jaehlee at snf.stanford.edu Sat Oct 23 21:41:42 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Sat, 23 Oct 2010 21:41:42 -0700 Subject: Comment tylan3 SNF 2010-10-23 21:41:41: Eric P helped me to clear out the boating problem. Message-ID: Sorry for shutting down the tool From maurice at snf.stanford.edu Sun Oct 24 13:08:41 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 24 Oct 2010 13:08:41 -0700 Subject: Shutdown tylan3 SNF 2010-10-23 21:19:05: boat out error - wafer still in the furnace Message-ID: Eric P cleared boat issue From maurice at snf.stanford.edu Sun Oct 24 13:09:01 2010 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Sun, 24 Oct 2010 13:09:01 -0700 Subject: Comment tylan3 SNF 2010-10-23 21:41:41: Eric P helped me to clear out the boating problem. Message-ID: logged Thanks Eric