From tberg at snf.stanford.edu  Mon Aug  1 06:11:57 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Mon, 1 Aug 2011 06:11:57 -0700
Subject: Comment tylan3 SNF 2011-08-01 06:11:56: system switched to Ar per jaehlee request
Message-ID: <mailman.542.1357938835.25964.tylan3-pcs@snf.stanford.edu>

system switched to Ar per jaehlee request



From tberg at snf.stanford.edu  Tue Aug  2 08:10:46 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 2 Aug 2011 08:10:46 -0700
Subject: Comment tylan3 SNF 2011-08-01 06:11:56: system switched to Ar per jaehlee request
Message-ID: <mailman.543.1357938835.25964.tylan3-pcs@snf.stanford.edu>

System Back To N2



From tberg at snf.stanford.edu  Tue Aug  2 08:11:05 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Tue, 2 Aug 2011 08:11:05 -0700
Subject: Comment tylan3 SNF 2011-08-02 08:11:05: System Back To N2
Message-ID: <mailman.544.1357938835.25964.tylan3-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Fri Aug  5 17:20:36 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 5 Aug 2011 17:20:36 -0700
Subject: Comment tylan3 SNF 2011-08-02 08:11:05: System Back To N2
Message-ID: <mailman.545.1357938835.25964.tylan3-pcs@snf.stanford.edu>

archived



From latta at snf.stanford.edu  Fri Aug  5 17:23:39 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 5 Aug 2011 17:23:39 -0700
Subject: Comment tylan3 SNF 2011-08-05 17:23:39: Aug quals
Message-ID: <mailman.546.1357938835.25964.tylan3-pcs@snf.stanford.edu>

WET900  00:39:00  50 wafer spread
  (expect about 920A)
Front = 852A, Std Dev = 3.0
Front Center = 876A, Std Dev = 3.3
Back Center = 895A, Std Dev = 3.7
Back = 905A, Std Dev = 3.1
Average All = 882A



From latta at snf.stanford.edu  Fri Aug  5 17:23:49 2011
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 5 Aug 2011 17:23:49 -0700
Subject: Comment tylan3 SNF 2011-06-01 17:08:28: June quals
Message-ID: <mailman.547.1357938835.25964.tylan3-pcs@snf.stanford.edu>

archived



From seymour at snf.stanford.edu  Tue Aug  9 08:12:08 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Tue, 9 Aug 2011 08:12:08 -0700
Subject: Comment tylan3 SNF 2011-08-09 08:12:07: checked monoblock MFC zeros
Message-ID: <mailman.548.1357938835.25964.tylan3-pcs@snf.stanford.edu>

intermitten H2-O2 INTERLOCK ALARM. Adjusted H2 MFC zero.



From seymour at snf.stanford.edu  Wed Aug 10 11:58:25 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 10 Aug 2011 11:58:25 -0700
Subject: Shutdown tylan3 SNF 2011-08-10 11:58:24: working on controller
Message-ID: <mailman.549.1357938835.25964.tylan3-pcs@snf.stanford.edu>




From seymour at snf.stanford.edu  Thu Aug 11 09:17:15 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 11 Aug 2011 09:17:15 -0700
Subject: Shutdown tylan3 SNF 2011-08-10 11:58:24: working on controller
Message-ID: <mailman.550.1357938835.25964.tylan3-pcs@snf.stanford.edu>

controller working correctly and I did all the mfc zeros and flowed all gasses at the levels of wet800 recipe.



From seymour at snf.stanford.edu  Thu Aug 11 09:18:44 2011
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Thu, 11 Aug 2011 09:18:44 -0700
Subject: Comment tylan3 SNF 2011-08-09 08:12:07: checked monoblock MFC zeros
Message-ID: <mailman.551.1357938835.25964.tylan3-pcs@snf.stanford.edu>

done with monoblock MFC zeros