From seymour at snf.stanford.edu Wed Feb 1 09:03:03 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Wed, 1 Feb 2012 09:03:03 -0800 Subject: Shutdown tylan3 SNF 2011-12-13 07:42:18: renovation Message-ID: removing shutdown to test tube From seymour at snf.stanford.edu Mon Feb 6 09:14:26 2012 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 6 Feb 2012 09:14:26 -0800 Subject: Comment tylan3 SNF 2012-02-06 09:14:25: installed a new TLCCLEAN bubbler Message-ID: From maurice at snf.stanford.edu Mon Feb 6 15:33:36 2012 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Mon, 6 Feb 2012 15:33:36 -0800 Subject: Problem tylan3 SNF 2012-02-06 15:33:36: hH/O2 interlock Message-ID: From latta at snf.stanford.edu Tue Feb 7 11:35:30 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 11:35:30 -0800 Subject: Shutdown tylan3 SNF 2012-02-07 11:35:29: Qual very thin Message-ID: about 400A. Looks like O2 did not turn on durning wet ox, just during dry ox. From latta at snf.stanford.edu Tue Feb 7 17:06:30 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:06:30 -0800 Subject: Problem tylan3 SNF 2012-02-06 15:33:36: hH/O2 interlock Message-ID: huh? From latta at snf.stanford.edu Tue Feb 7 17:09:20 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:09:20 -0800 Subject: Shutdown tylan3 SNF 2012-02-07 11:35:29: Qual very thin Message-ID: Ran wet900 (w/o wafers) and the wet step was fine.... From latta at snf.stanford.edu Tue Feb 7 17:16:28 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:16:28 -0800 Subject: Comment tylan3 SNF 2012-02-07 17:16:27: Feb quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 422A, Std Dev = 2.9 Front Center = 439A, Std Dev = 4.0 Back Center - not run Back = 454A, Std Dev = 4.8 Average All = 438A These results are too thin. Will re-run the qual soon. From latta at snf.stanford.edu Tue Feb 7 17:16:44 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:16:44 -0800 Subject: Comment tylan3 SNF 2011-12-01 16:03:35: Dec quals Message-ID: newer quals run. From latta at snf.stanford.edu Tue Feb 7 17:19:24 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:19:24 -0800 Subject: Comment tylan3 SNF 2012-02-06 09:14:25: installed a new TLCCLEAN bubbler Message-ID: Thanks, Ray From latta at snf.stanford.edu Tue Feb 7 17:19:39 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:19:39 -0800 Subject: Problem tylan3 SNF 2012-02-07 17:19:38: can't enable on coral Message-ID: From latta at snf.stanford.edu Tue Feb 7 17:19:59 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:19:59 -0800 Subject: Problem tylan3 SNF 2012-02-07 17:19:58: qual too thin- rerun soon Message-ID: From latta at snf.stanford.edu Tue Feb 7 17:27:29 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 7 Feb 2012 17:27:29 -0800 Subject: Problem tylan3 SNF 2012-02-07 17:27:28: Display on panel not working Message-ID: Tycom is fine. From latta at snf.stanford.edu Tue Feb 14 16:01:22 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 16:01:22 -0800 Subject: Problem tylan3 SNF 2012-02-07 17:27:28: Display on panel not working Message-ID: display ok From latta at snf.stanford.edu Tue Feb 14 16:04:22 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 16:04:22 -0800 Subject: Comment tylan3 SNF 2012-02-14 16:04:22: Re-test of Feb quals Message-ID: WET900 00:39:00 50 wafer spread (expect about 920A) Front = 804A, Std Dev = 6.2 Front Center = 832A, Std Dev = 2.2 Back Center - 866A, Std Dev = 2.5 Back = 894A, Std Dev = 2.7 Average All = 849A From latta at snf.stanford.edu Tue Feb 14 16:05:21 2012 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 14 Feb 2012 16:05:21 -0800 Subject: Problem tylan3 SNF 2012-02-07 17:19:58: qual too thin- rerun soon Message-ID: new quals consistent with Dec and Nov quals. From shott at snf.stanford.edu Fri Feb 17 06:14:01 2012 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 17 Feb 2012 06:14:01 -0800 Subject: Problem tylan3 SNF 2012-02-07 17:19:38: can't enable on coral Message-ID: Coral phone jack was disconnected in the fingerwall .... probably during the plumbing activity to connect the nearby wet bench to the HF drain. Also, the jack into the actual interlock for tylan 4 had been moved from the left to the right side that reversed the wiring on this interlock. Everything is fully functional now. John