From erictonn at stanford.edu Wed Apr 23 16:09:43 2003 From: erictonn at stanford.edu (erictonn at stanford.edu) Date: Wed, 23 Apr 2003 16:09:43 -0700 Subject: wafer lost Message-ID: <1051139383.3ea71d37a7077@webmail.stanford.edu> HI users, Did anyone take one wafer out of tube 3 today by mistake? I couldn't find my wafer there. Please let me know if you find one "stranger" wafer. Thanks. -eric From sanli at piezo.Stanford.EDU Fri Apr 25 10:34:03 2003 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Fri, 25 Apr 2003 10:34:03 -0700 (PDT) Subject: cancell reservation today Message-ID: Hi, I'm unable to come to he lab today, and I do not have remote coral access. Please feel free to use my reservation time which starts at 12:30 Sanli From sanli at piezo.Stanford.EDU Sun Apr 27 15:21:51 2003 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Sun, 27 Apr 2003 15:21:51 -0700 (PDT) Subject: Tylan 3 problem Message-ID: I ran a wet oxidation today on tylan3 at 900 C. The target thickness was 1790 A, but somehow the process is screwed up. Here are the thicknesses I got from the 13 wafers I had from back to the front: [Back] 2203 2107 1981 1876 1864 1788 1704 1647 1586 1504 1390 1315 1152 [Front] There were no alarms. Please be aware. I have no idea why this happened. Sanli From sanli at piezo.Stanford.EDU Sun Apr 27 15:32:12 2003 From: sanli at piezo.Stanford.EDU (Sanli Ergun) Date: Sun, 27 Apr 2003 15:32:12 -0700 (PDT) Subject: tylan 3 problem Message-ID: It looks like the problem is a bad termocouple which, I guess, resulted in a temperature gradient in the tube. I'm going to shut it down as it is not functional at this point. Sanli From sigari at snf.stanford.edu Tue Apr 29 16:42:42 2003 From: sigari at snf.stanford.edu (Elaheh Sigari) Date: Tue, 29 Apr 2003 16:42:42 -0700 (PDT) Subject: warning about tylan 3 Message-ID: I just wanted to warn all tylan users about the recent issue with tylan 3. It looks like the thermocouple in this furnace is not stable and sometimes fails during the process. I noticed this problem today while I was running a process in this tube. The temperature reading was normal at the beginning of the process and later when I wanted to unload the wafers I noticed a low temperature ( 440 degrees) reading. Elaheh