I ran a wet oxidation today on tylan3 at 900 C. The target thickness was 1790 A, but somehow the process is screwed up. Here are the thicknesses I got from the 13 wafers I had from back to the front: [Back] 2203 2107 1981 1876 1864 1788 1704 1647 1586 1504 1390 1315 1152 [Front] There were no alarms. Please be aware. I have no idea why this happened. Sanli