Tylan 3 problem

Sanli Ergun sanli at piezo.Stanford.EDU
Sun Apr 27 15:21:51 PDT 2003


I ran a wet oxidation today on tylan3 at 900 C. The target thickness was
1790 A, but somehow the process is screwed up. Here are the thicknesses I
got from the 13 wafers I had from back to the front:
[Back] 2203 2107 1981 1876 1864 1788 1704 1647 1586 1504 1390 1315 1152
[Front]
There were no alarms. Please be aware. I have no idea why this happened.

Sanli




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