warning about tylan 3

Elaheh Sigari sigari at snf.stanford.edu
Tue Apr 29 16:42:42 PDT 2003


I just wanted to warn all tylan users about the recent issue with tylan 3.
It looks like the thermocouple in this furnace is not stable and
sometimes fails during the process. I noticed this problem today while I
was running a process in this tube. The temperature reading was normal at
the beginning of the process and later when I wanted to unload the wafers I
noticed a low temperature ( 440 degrees) reading.
Elaheh




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