From latta at snf.stanford.edu Thu Aug 8 11:51:32 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 8, 2002 11:51:32 AM Subject: Problem tylan4 2002-08-08 11:51:29: Ox thickness 10% low... Message-ID: Results of Frank's test show that tylan4 is 10 lower in thickness than tylan2 From tberg at snf.stanford.edu Mon Aug 12 03:49:02 2002 From: tberg at snf.stanford.edu (tberg at snf.stanford.edu) Date: Aug 12, 2002 3:49:02 PM Subject: Comment tylan4 2002-08-12 15:49:01: TYlan 4 Message-ID: Checked temperature,replaced torch checked gas flows. needs another test From gladys at snf.stanford.edu Tue Aug 13 04:00:45 2002 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Aug 13, 2002 4:00:45 PM Subject: Problem tylan4 2002-08-08 11:51:29: Ox thickness 10% low...: testrun completed, thickness is good, ok to use Message-ID: From mcvittie at snf.stanford.edu Tue Aug 27 08:04:08 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 27, 2002 8:04:08 PM Subject: Problem tylan4 2002-08-27 20:04:07: Intermittance H2 Fault Message-ID: While running TCACLEAN, got H2 fault at beginning of 1st steam step (#25). Fault cleared after pressing alarm ack on manual control panel. Jim McVittie From mcvittie at snf.stanford.edu Wed Aug 28 07:10:53 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Aug 28, 2002 7:10:53 PM Subject: Problem tylan4 2002-08-28 19:10:53: N2 Flow fault--Flow Now ok Message-ID: 6:30 pm found tube in alarm with N2 flow fault. After ack, N2 flow looks ok, Jim From mtang at snf.stanford.edu Wed Aug 28 19:27:04 2002 From: mtang at snf.stanford.edu (Mary Tang) Date: Wed, 28 Aug 2002 19:27:04 -0700 Subject: Use of Steam in Ox Furnaces Message-ID: <3D6D8678.8B0E56A0@snf.stanford.edu> I'm forwarding a note that Nancy wrote (below) as a warning for use of oxidation furnaces... We'll keep you posted... Mary ------------------- Folks, During TCA testing last night or this morning crud, probably from either the TCA bubbler or the TCA lines to oxditation tubes 1-4, was introducted into the tubes via the injectors. A short TCA dry clean was performed after the TCA lines were replaced, so we are fairly confident that the tubes are not contaminated. There may, however, be an issue when the injectors have gases flowing through them. Rather than shut down all the funaces, we are sending this warning against using wet programs in tylans1-4. If possible, please delay your steam oxidation processing until we have more information. A message describing all the events and issues should be forthcoming, but since you have all reserved ox furnaces for tonight or tomorrow morning you are receiving this advance warning. Thanks and appologies for any confusion of hassle this causes. Nancy -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu -- Mary X. Tang, Ph.D. National Nanofabrication Users' Network Stanford Nanofabrication Facility CIS Room 136, Mail Code 4070 Stanford, CA 94305 (650)723-9980 mtang at snf.stanford.edu From mtang at snf.stanford.edu Wed Aug 28 07:28:33 2002 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Aug 28, 2002 7:28:33 PM Subject: Problem tylan4 2002-08-28 19:28:31: Please do not use steam ox til further notice Message-ID: