From maurice at snf.stanford.edu Fri Nov 1 16:59:14 2002 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Fri, 01 Nov 2002 16:59:14 -0800 Subject: Uniformity results Nov 1 Message-ID: <3DC32362.F4D7488E@snf.stanford.edu> Wet Ox WET900 00:39:00 Wf position Center Top Bottom Right Left Average 1 (front) 939 985 983 944 949 942A 2 966 928 1010 969 983 971A 3 990 948 1014 989 996 987A 4 (back) 988 968 1011 983 1000 990A -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278 From latta at snf.stanford.edu Mon Nov 4 17:21:25 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Mon, 04 Nov 2002 17:21:25 -0800 Subject: Ox test- before pull&clean Message-ID: <3DC71D15.D1737F35@snf.stanford.edu> Folks, As promised, the ellipsometry results for the test run of Oct 23; WET900, 00:39:00. It was done Oct 23, 2002. Wf Center Bottom Right Top Left F 987/1.469 978/1.469 984/1.459 995/1.468 993/1.468 2 984/1.467 972/1.469 984/1.469 990/1.469 984/1.469 3 985/1.469 975/1.468 983/1.468 992/1.469 983/1.468 B 984/1.469 968/1.469 982/1.469 992/1.468 983/1.468 -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From seymour at snf.stanford.edu Tue Nov 5 10:13:41 2002 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Nov 5, 2002 10:13:41 AM Subject: Shutdown tylan4 2002-10-24 14:51:12: Pull and clean Message-ID: pull and clean completed From latta at snf.stanford.edu Tue Nov 5 10:20:33 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 5, 2002 10:20:33 AM Subject: Problem tylan4 2002-10-30 15:23:26: Ox test results Message-ID: In Achive already. From latta at snf.stanford.edu Tue Nov 5 10:21:55 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 5, 2002 10:21:55 AM Subject: Problem tylan4 2002-11-05 10:21:54: Wet Ox thickness uniformity 5% Message-ID: Releaseing furnce with note to tylan4 user about the thickness uniformity out of spec, 5% vs 1-2%. From latta at snf.stanford.edu Wed Nov 13 13:18:37 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Wed, 13 Nov 2002 13:18:37 -0800 Subject: Uniformity test- bad! Message-ID: <3DD2C1AD.3E68945D@snf.stanford.edu> Folks, Here are the results of yesterday's uniformity check. Again WET900 for 00:39:00. Measurements by ellipsometry. Wf Center Top Bottom Right Left F 761 1.461 849 1.464 677 1.459 774 1.462 768 1.462 2 815 1.463 903 1.464 724 1.460 826 1.463 818 1.463 3 865 1.463 913 1.464 777 1.462 876 1.463 852 1.464 B 884 1.464 923 1.464 839 1.464 890 1.464 878 1.464 Ugggg! -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From mdickey at snf.stanford.edu Mon Nov 18 02:12:31 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Nov 18, 2002 2:12:31 PM Subject: Comment tylan4 2002-11-18 14:12:30: Damper Message-ID: The dampers to the scavenger have been closed upon request From latta at snf.stanford.edu Tue Nov 19 09:33:21 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 19 Nov 2002 09:33:21 -0800 Subject: Uniformity test- damper closed Message-ID: <3DDA75E1.A7445614@snf.stanford.edu> Results for the test run with the dampers fully closed. WET900 00:39:00 Ellipsometer measured Wf Center Top Bottom Right Left F 1088 1.466 1095 1.466 1070 1.466 1088 1.466 1089 1.466 2 1090 1.466 1100 1.466 1078 1.466 1092 1.466 1092 1.466 3 1094 1.465 1097 1.466 1076 1.466 1093 1.466 1077 1.466 B 1077 1.466 1083 1.466 1066 1.466 1078 1.466 1077 1.466 -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From latta at snf.stanford.edu Tue Nov 19 16:51:47 2002 From: latta at snf.stanford.edu (Nancy Latta) Date: Tue, 19 Nov 2002 16:51:47 -0800 Subject: Test results, misaligned door Message-ID: <3DDADCA3.CD7663BF@snf.stanford.edu> Door was intentionally misaligned, dampers opened up again. WET900 00:39:00 Ellipsometer Wf Center Top Bottom Right Left F 1104 1.465 1105 1.466 1089 1.466 1102 1.465 1101 1.466 2 1098 1.465 1107 1.465 1087 1.465 1098 1.465 1100 1.465 3 1100 1.466 1102 1.465 1086 1.466 1097 1.466 1099 1.466 B 1080 1.466 1087 1.466 1067 1.466 1081 1.467 1081 1.466 -- Nancy Latta Stanford Nanofabrication Facility CIS Room 145 420 Via Palou Mall Stanford, CA 94305-4070 (650) 725-6727 latta at snf.stanford.edu From latta at snf.stanford.edu Wed Nov 20 03:28:37 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 20, 2002 3:28:37 PM Subject: Problem tylan4 2002-11-05 10:21:54: Wet Ox thickness uniformity 5% Message-ID: Magically, the tube has healed itself. Will post warning note to tylan4 about the possible return of the demons..... From latta at snf.stanford.edu Thu Nov 21 10:53:55 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Nov 21, 2002 10:53:55 AM Subject: Problem tylan4 2002-11-21 10:53:53: See Discussion List archive Message-ID: