Shutdown tylan4 2002-09-24 15:58:30: needs uniformity test.

latta at snf.stanford.edu latta at snf.stanford.edu
Wed Oct 23 03:14:51 PDT 2002


Uniformity test completed.
Wafer position    L       C       R        T        B             Avr
1 (front)           1025  1024 1022 1030  1014      1023A
2                       1017  1015 1017 1022 1010       1016A
3                       1015 1018 1020  1023 1009       1017A
4 back)            1021 1018 1019  1024 1013       1019A




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