Uniformity results Oct 28 &29

[Nancy Latta]

Folks,

Here are the results from yesterday's and today's WET900 00:39:00
oxidation runs.  We've got a problem.  

Wf pos    Center      Top         Left        Bottom      Right   

Oct 28
1 Front   805/1.468   870/1.468   807/1.468   730/1.465   810/1.468 
2         848/1.469   914/1.468   863/1.468   778/1.469   846/1.468
3         881/1.469   935/1.468   890/1.468   783/1.468   886/1.469
4 Back    901/1.469   935/1.469   891/1.469   858/1.469   913/1.469

Oct 29
1 Front   734/1.464   826/1.466   737/1.465   649/1.464   763/1.464
2         798/1.466   891/1.467   804/1.465   690/1.463   818/1.466
3         836/1.467   897/1.467   840/1.465   730/1.464   856/1.467
4 Back    856/1.466   898/1.466   850/1.466   802/1.466   851/1.466
-- 
-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu