Uniformity results Sept 26, tylan2 & 4

Nancy Latta latta at snf.stanford.edu
Tue Oct 29 16:21:53 PST 2002


For historical reasons I am adding the runs done earlier this and last
month.  Please note, they are for WET900 00:42:00 and the measurements
were done on nanospec.

Folks,

Today I was able to run unifomity checks using Jim's recommended WET900
program.  Both tubes were run with the same program for the same time
(42mins) at the same time.  The results, below, are interesting.

The data is displayed with the front wafer first and the spread was over
two boats per tube, positioned identically;

Wf position     Center  Top     Bottom  Right   Left    Average

Tylan2
1 (front)       1061    1063    1058    1062    1061    1061A
2               1064    1066    1060    1067    1062    1064A
3               1072    1074    1069    1074    1070    1072A
4 (back)        1087    1091    1084    1090    1081    1087A

Tylan4
1 (front)        847     869     822     854     854     849A
2                871     884     854     879     876     873A
3                883     890     868     886     880     881A
4 (back)         889     893     883     889     891     889A

-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu



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