Wet & Dry Ox results, Oct 1

Nancy Latta latta at snf.stanford.edu
Tue Oct 29 16:25:11 PST 2002


Folks,

Again, for comparison reasons, here are the previous wet and dry ox
measurements, again measured on nanospec.

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Folks,

Here is the data for the last two runs I did in tylan4.  Dry ox was run
first followed by wet ox the next day.  Before either program was run
Ray checked the temp profile for tylan4. Jim and Ray were available to
check the temp readings during the wet ox.  They are within 1-2 degrees
of the tycom read out.

Wf position     Center  Top     Bottom  Right   Left    Average

Dry Ox   DRY1000  03:10:00
1 (front)       1164    1153    1160    1164    1168    1162A
2               1157    1156    1158    1158    1156    1157A
3               1154    1154    1151    1155    1151    1153A
4 (back)        1144    1145    1140    1145    1145    1144A

Wet Ox  WET900  00:42:00                                
1 (front)        871     884     840     873     875     869A
2                880     895     866     890     875     881A
3                890     898     877     894     891     890A
4 (back)         892     898     885     894     892     892A

Please note that the WET900 results track closely with the reults of the
run on 9/26/02.  This is after the temp profile was checked.



-- 
Nancy Latta
Stanford Nanofabrication Facility
CIS Room 145 
420 Via Palou Mall
Stanford, CA 94305-4070
(650) 725-6727
latta at snf.stanford.edu



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