Problem tylan4 2002-10-30 15:23:26: Ox test results
latta at snf.stanford.edu
latta at snf.stanford.edu
Wed Oct 30 03:23:27 PST 2002
It's not the injector
Again, WET900, 00:39:00, measured by ellipsometer
Wf Center Bottom Right Top Left
Front 819/1.468 747/1.468 850/1.469 900/1.469 809/1.467
#2 866/1.469 817/1.469 858/1.468 918/1.468 885/1.467
#3 893/1.468 819/1.468 882/1.468 939/1.468 911/1.468
Back 906/1.469 869/1.469 894/1.469 938/1.468 919/1.468
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