From latta at snf.stanford.edu Wed Apr 16 09:37:31 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 16, 2003 9:37:31 AM Subject: Shutdown tylan4 2003-04-16 09:37:30: Report Shutdown for tylan4 Message-ID: Needs TransL clean.... From latta at snf.stanford.edu Wed Apr 16 10:10:50 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Apr 16, 2003 10:10:50 AM Subject: Shutdown tylan4 2003-04-16 09:37:30: Report Clear for tylan4 Message-ID: TransL clean From maurice at snf.stanford.edu Wed Apr 16 18:08:22 2003 From: maurice at snf.stanford.edu (Maurice Stevens) Date: Wed, 16 Apr 2003 18:08:22 -0700 Subject: WBDIFF cleaning Message-ID: <3E9DFE86.3090106@snf.stanford.edu> Wbdiff users, We had an incident this week of a labmember not completely cleaning their wafers in the wbdiff sink and then going into an oxide furnace. Part of their clean was done in wbsilicide. The complete diffusion clean is to be done in the wbdiff sink Any changes to this policy will be emailed to the entire userbase of wbdiff. If you are unclear on the cleaning procedures or need a refresher, please refer to http://snf.stanford.edu/Process/WetProcessing/StdPreDiffClean.html. This web page has all the who, what and why's. If you still have questions please contact one of the staff members. The furnace has been cleaned and the vacuum wand tip was changed. -Maurice -- maurice at stanford.edu Maurice Stevens Stanford Nanofabrication Facility CIS Room 142, Mail Code 4070 Stanford, CA 94305 P. (650)725-3660 F. (650)725.6278