From quickwin at snf.stanford.edu  Mon Dec 15 15:52:14 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Mon, 15 Dec 2003 15:52:14 -0800
Subject: Problem tylan4 2003-12-15 15:52:13: tube is not well aligned to the transport mechanism?
Message-ID: <mailman.140.1357938851.25973.tylan4-pcs@snf.stanford.edu>




From quickwin at snf.stanford.edu  Mon Dec 15 18:07:03 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Mon, 15 Dec 2003 18:07:03 -0800
Subject: Shutdown tylan4 2003-12-15 18:07:03: there seems to be half a wafer inside the tube
Message-ID: <mailman.141.1357938851.25973.tylan4-pcs@snf.stanford.edu>

I was unable to finish my run because of an alarm. 
By the way, it was not my wafer that's broken. Why no one reported this problem before me?



From mdickey at snf.stanford.edu  Tue Dec 16 07:17:06 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 16 Dec 2003 07:17:06 -0800
Subject: Shutdown tylan4 2003-12-15 18:07:03: there seems to be half a wafer inside the tube
Message-ID: <mailman.142.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Cleaned out broken wafer and checked alignment...check with a boat in/out step...unable to duplicate any errors



From mdickey at snf.stanford.edu  Tue Dec 16 07:17:32 2003
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Tue, 16 Dec 2003 07:17:32 -0800
Subject: Problem tylan4 2003-12-15 15:52:13: tube is not well aligned to the transport mechanism?
Message-ID: <mailman.143.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Alignment of tube is within useage