Shutdown tylan4 2003-12-15 18:07:03: there seems to be half a wafer inside the tube

quickwin at snf.stanford.edu quickwin at snf.stanford.edu
Mon Dec 15 18:07:03 PST 2003


I was unable to finish my run because of an alarm. 
By the way, it was not my wafer that's broken. Why no one reported this problem before me?




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