Problem tylan4 2003-12-15 15:52:13: tube is not well aligned to the transport mechanism?

mdickey at snf.stanford.edu mdickey at snf.stanford.edu
Tue Dec 16 07:17:32 PST 2003

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Alignment of tube is within useage

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Next message: Shutdown tylan4 2003-12-15 18:07:03: there seems to be half a wafer inside the tube
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