From yyao at snf.stanford.edu  Wed Jul  9 09:40:38 2003
From: yyao at snf.stanford.edu (yyao at snf.stanford.edu)
Date: Jul 9, 2003 9:40:38 AM
Subject: Problem tylan4 2003-07-09 09:40:37: Report Problem for tylan4
Message-ID: <mailman.122.1357938851.25973.tylan4-pcs@snf.stanford.edu>

TCU error: 04 is showing



From maurice at snf.stanford.edu  Wed Jul  9 09:47:59 2003
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Jul 9, 2003 9:47:59 AM
Subject: Shutdown tylan4 2003-07-09 09:47:57: Report Shutdown for tylan4
Message-ID: <mailman.123.1357938851.25973.tylan4-pcs@snf.stanford.edu>

TCU problem



From seymour at snf.stanford.edu  Wed Jul  9 02:19:35 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 9, 2003 2:19:35 PM
Subject: Problem tylan4 2003-07-09 09:40:37: Report Clear for tylan4
Message-ID: <mailman.124.1357938851.25973.tylan4-pcs@snf.stanford.edu>

error cleared



From seymour at snf.stanford.edu  Wed Jul  9 02:21:53 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 9, 2003 2:21:53 PM
Subject: Shutdown tylan4 2003-07-09 09:47:57: Report Clear for tylan4
Message-ID: <mailman.125.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Element breaker off. Found no cause for breaker to be off. Turned on and remped up to 800. Ran Tran LC clean. 



From vroom at snf.stanford.edu  Sun Jul 13 06:05:41 2003
From: vroom at snf.stanford.edu (vroom at snf.stanford.edu)
Date: Jul 13, 2003 6:05:41 PM
Subject: Problem tylan4 2003-07-13 18:05:39: Report Problem for tylan4
Message-ID: <mailman.126.1357938851.25973.tylan4-pcs@snf.stanford.edu>

no oxide grown on wafers during wet 1100 program.   TCU       error 4 on status screen



From tberg at snf.stanford.edu  Mon Jul 14 06:50:26 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jul 14, 2003 6:50:26 AM
Subject: Shutdown tylan4 2003-07-14 06:50:24: Report Shutdown for tylan4
Message-ID: <mailman.127.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Furnace was cold breaker off. Turned back on heating up



From tberg at snf.stanford.edu  Mon Jul 14 09:49:49 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jul 14, 2003 9:49:49 AM
Subject: Shutdown tylan4 2003-07-14 06:50:24: Report Clear for tylan4
Message-ID: <mailman.128.1357938851.25973.tylan4-pcs@snf.stanford.edu>

REset breaker at temp now -observing



From tberg at snf.stanford.edu  Mon Jul 14 09:51:05 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jul 14, 2003 9:51:05 AM
Subject: Problem tylan4 2003-07-13 18:05:39: Report Clear for tylan4
Message-ID: <mailman.129.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Breaker was tripped reset and back at temp-observing



From tberg at snf.stanford.edu  Mon Jul 14 09:52:29 2003
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Jul 14, 2003 9:52:29 AM
Subject: Problem tylan4 2003-07-14 09:52:28: Report Problem for tylan4
Message-ID: <mailman.130.1357938851.25973.tylan4-pcs@snf.stanford.edu>

observing breaker trips



From seymour at snf.stanford.edu  Tue Jul 15 07:17:16 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 15, 2003 7:17:16 AM
Subject: Shutdown tylan4 2003-07-15 07:17:15: Report Shutdown for tylan4
Message-ID: <mailman.131.1357938851.25973.tylan4-pcs@snf.stanford.edu>

changing SCR heatsink fan



From seymour at snf.stanford.edu  Tue Jul 15 09:25:05 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 15, 2003 9:25:05 AM
Subject: Problem tylan4 2003-07-14 09:52:28: Report Clear for tylan4
Message-ID: <mailman.132.1357938851.25973.tylan4-pcs@snf.stanford.edu>

element breaker trips caused by SCR  overtemp due to faulty fan



From seymour at snf.stanford.edu  Tue Jul 15 09:25:43 2003
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Jul 15, 2003 9:25:43 AM
Subject: Shutdown tylan4 2003-07-15 07:17:15: Report Clear for tylan4
Message-ID: <mailman.133.1357938851.25973.tylan4-pcs@snf.stanford.edu>

replaced SCR fan and checked operation of temp controller.