From amyers at snf.stanford.edu  Tue Apr  6 23:52:40 2004
From: amyers at snf.stanford.edu (amyers at snf.stanford.edu)
Date: Tue, 6 Apr 2004 23:52:40 -0700
Subject: Problem tylan4 2004-04-06 23:52:39: mfc alarm
Message-ID: <mailman.158.1357938851.25973.tylan4-pcs@snf.stanford.edu>

found tool in mfc alarm while running wet950.  process completed on its own.  target thickness was 2500 angstroms.  measured 2300 angstroms



From latta at snf.stanford.edu  Fri Apr 23 15:07:24 2004
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 23 Apr 2004 15:07:24 -0700
Subject: Problem tylan4 2004-04-15 15:12:52: quartz wand
Message-ID: <mailman.159.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Wand replaced and looking good....



From latta at snf.stanford.edu  Fri Apr 23 15:07:37 2004
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 23 Apr 2004 15:07:37 -0700
Subject: Problem tylan4 2004-04-15 15:12:52: quartz wand
Message-ID: <mailman.160.1357938851.25973.tylan4-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Fri Apr 23 15:08:11 2004
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Fri, 23 Apr 2004 15:08:11 -0700
Subject: Problem tylan4 2004-04-06 23:52:39: mfc alarm
Message-ID: <mailman.161.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Need more information to determine which gas alarmed.



From ericp at snf.stanford.edu  Tue Apr 27 23:38:13 2004
From: ericp at snf.stanford.edu (ericp at snf.stanford.edu)
Date: Tue, 27 Apr 2004 23:38:13 -0700
Subject: Problem tylan4 2004-04-27 23:38:12: cantellever sheath cracked
Message-ID: <mailman.162.1357938851.25973.tylan4-pcs@snf.stanford.edu>

the sheath on one of the cantellevers is cracked. 



From tberg at snf.stanford.edu  Wed Apr 28 07:08:41 2004
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Wed, 28 Apr 2004 07:08:41 -0700
Subject: Shutdown tylan4 2004-04-28 07:08:40: broken cantilever sheath
Message-ID: <mailman.163.1357938851.25973.tylan4-pcs@snf.stanford.edu>




From mdickey at snf.stanford.edu  Wed Apr 28 08:22:07 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 28 Apr 2004 08:22:07 -0700
Subject: Shutdown tylan4 2004-04-28 07:08:40: broken cantilever sheath
Message-ID: <mailman.164.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Replaced broken sheath



From mdickey at snf.stanford.edu  Wed Apr 28 08:22:20 2004
From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu)
Date: Wed, 28 Apr 2004 08:22:20 -0700
Subject: Problem tylan4 2004-04-27 23:38:12: cantellever sheath cracked
Message-ID: <mailman.165.1357938851.25973.tylan4-pcs@snf.stanford.edu>

Both sheaths replaced