Problem tylan4 2004-04-06 23:52:39: mfc alarm

amyers at snf.stanford.edu amyers at snf.stanford.edu
Tue Apr 6 23:52:40 PDT 2004


found tool in mfc alarm while running wet950.  process completed on its own.  target thickness was 2500 angstroms.  measured 2300 angstroms




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