Problem tylan4 SNF 2004-08-20 03:38:59: small piece stuck in the quartz boat

kimsangb at snf.stanford.edu kimsangb at snf.stanford.edu
Fri Aug 20 03:39:00 PDT 2004


One of my wafers is broken on the second quartz boat from the furnace cover and a small broken piece is stuck in the second groove from the back. 




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