From seymour at snf.stanford.edu Mon Feb 2 10:39:12 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 2 Feb 2004 10:39:12 -0800 Subject: Problem tylan4 2004-01-30 15:54:24: Boat-in sensor not working Message-ID: The tube is functioning normally. The recipe called for 20 mins in step 10, which operator did not wait before thinking tube down. I ran a complete wet1000 this morning and it went through just fine. tube is up. From parco at snf.stanford.edu Fri Feb 6 14:10:11 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Fri, 6 Feb 2004 14:10:11 -0800 Subject: Problem tylan4 2004-02-06 14:10:10: tube hung-up Message-ID: completed recipe run, removed wafers, hit alm ack (x2), tube went in short, and got hung-up. incident happened before w/ another user. gladys corrected the problem but still needs to determine causes to avoid future incident. From parco at snf.stanford.edu Sat Feb 7 10:05:08 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Sat, 7 Feb 2004 10:05:08 -0800 Subject: Problem tylan4 2004-02-07 10:05:07: tube hung-up again Message-ID: tylan 4 tube hung-up again... hit "abort", then "run", and "alm ack". watch tube go in completely & check status on tylan//tycom. status "good" running wet1100 recipe for 02:30:00. From parco at snf.stanford.edu Mon Feb 9 07:23:05 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Mon, 9 Feb 2004 07:23:05 -0800 Subject: Problem tylan4 2004-02-09 07:23:04: hung-up again Message-ID: same problem occurred on 2/7/2004. followed same procedures to put tube in to continue run cycle. From parco at snf.stanford.edu Mon Feb 9 12:09:21 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Mon, 9 Feb 2004 12:09:21 -0800 Subject: Problem tylan4 2004-02-09 12:09:20: tube hung-up again (4th time) Message-ID: tube hung-up, followed procedures, watch tube go in after neccessary steps From mdickey at snf.stanford.edu Mon Feb 9 12:57:00 2004 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 9 Feb 2004 12:57:00 -0800 Subject: Shutdown tylan4 2004-02-09 12:57:00: Bearing change Message-ID: Needs bearing changed and height adjustment From seymour at snf.stanford.edu Mon Feb 9 14:23:23 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Feb 2004 14:23:23 -0800 Subject: Shutdown tylan4 2004-02-09 12:57:00: Bearing change Message-ID: all loader bearings changed. loader operation checked. It is up for use From seymour at snf.stanford.edu Mon Feb 9 14:24:02 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Feb 2004 14:24:02 -0800 Subject: Problem tylan4 2004-02-09 12:09:20: tube hung-up again (4th time) Message-ID: Has been cleared by changing bearings From seymour at snf.stanford.edu Mon Feb 9 14:24:31 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Feb 2004 14:24:31 -0800 Subject: Problem tylan4 2004-02-09 07:23:04: hung-up again Message-ID: cleared by bearing change From seymour at snf.stanford.edu Mon Feb 9 14:24:47 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Feb 2004 14:24:47 -0800 Subject: Problem tylan4 2004-02-07 10:05:07: tube hung-up again Message-ID: changed bearings From seymour at snf.stanford.edu Mon Feb 9 14:25:15 2004 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Mon, 9 Feb 2004 14:25:15 -0800 Subject: Problem tylan4 2004-02-06 14:10:10: tube hung-up Message-ID: changed bearings From crichter at snf.stanford.edu Wed Feb 25 18:07:21 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Wed, 25 Feb 2004 18:07:21 -0800 Subject: Problem tylan4 2004-02-25 18:07:20: MFS alarm at 6:05pm Message-ID: