From latta at snf.stanford.edu Thu Aug 3 16:10:26 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Aug 2006 16:10:26 -0700 Subject: Comment tylan4 SNF 2006-08-03 16:10:25: Aug process quals results Message-ID: 50 wafer spread WET900 00:39:00 Average all wafers = 929 Wafer-to-wafer = 4.0% Within-a-wafer = 2.6% From mdickey at snf.stanford.edu Tue Aug 22 14:39:12 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 22 Aug 2006 14:39:12 -0700 Subject: Comment tylan4 SNF 2006-08-22 14:39:11: Boat in closure Message-ID: The cantilever is sometimes stopping about an inch from the tube. Please stay and observe the boat in and do a manual boat in if necessary. I will trouble shoot in the morning. From king at snf.stanford.edu Tue Aug 22 23:23:12 2006 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 22 Aug 2006 23:23:12 -0700 Subject: Problem tylan4 SNF 2006-08-22 23:23:11: TLC controller alarms for level Message-ID: Can't run a TLC clean. From mdickey at snf.stanford.edu Wed Aug 23 07:42:20 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Aug 2006 07:42:20 -0700 Subject: Comment tylan4 SNF 2006-08-22 14:39:11: Boat in closure Message-ID: Problem fixed From mdickey at snf.stanford.edu Wed Aug 23 07:43:36 2006 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 23 Aug 2006 07:43:36 -0700 Subject: Problem tylan4 SNF 2006-08-22 23:23:11: TLC controller alarms for level Message-ID: The source level is full. The reason the recipe would not run was because the door did not close all the way. I trimmed a burr that was on the cable. Did 3 boat in/out tests and it was good.