From ericp at snf.stanford.edu Wed Jul 5 21:39:17 2006 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Wed, 5 Jul 2006 21:39:17 -0700 Subject: Problem tylan4 SNF 2006-07-05 21:39:17: MFS Alarm Message-ID: It appears that the H2/O2 MFC is not working properly: Flow is much lower than SP, and it keeps giving "MFS alarm". From seymour at snf.stanford.edu Thu Jul 6 08:33:17 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Jul 2006 08:33:17 -0700 Subject: Comment tylan4 SNF 2006-06-27 17:23:37: TLCCLEAN run Message-ID: noted From seymour at snf.stanford.edu Thu Jul 6 08:33:36 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Jul 2006 08:33:36 -0700 Subject: Comment tylan4 SNF 2006-06-08 10:40:26: process quals- June Message-ID: noted From seymour at snf.stanford.edu Thu Jul 6 11:04:17 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 6 Jul 2006 11:04:17 -0700 Subject: Problem tylan4 SNF 2006-07-05 21:39:17: MFS Alarm Message-ID: Checked MFS460 channel values and adjusted H2 and N2Carrier. Set and flowed O2 at 1000 sccm, H2 at 150 and O2 flow was 1033 and H2 was 1519, N2carrier fault for a leak went away. From seymour at snf.stanford.edu Thu Jul 13 11:31:17 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 13 Jul 2006 11:31:17 -0700 Subject: Shutdown tylan4 SNF 2006-07-13 11:31:16: H2/O2 MFS alarm Message-ID: I had to abort the run to silence alarm. From seymour at snf.stanford.edu Thu Jul 13 11:37:13 2006 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Thu, 13 Jul 2006 11:37:13 -0700 Subject: Shutdown tylan4 SNF 2006-07-13 11:31:16: H2/O2 MFS alarm Message-ID: Door switch not made. ran loader farther in and door switch interlock then good . Restarted recipe as it was stopped in step 25 when O2 was turned on by program so no oxidation had yet been done.